Paper Title:
Structure Property of Titanium Dioxide Thin Films in Sintered Temperature by the Sol-Gel Method
  Abstract

Titanium dioxide (TiO2) thin film on glass substrate is fabricated by sol-gel method. The TiO2 film is sintered at various temperatures for investigation on the refraction index and crystallization characteristic. The lower refractive index of the TiO2 thin film is 1.89 when the sintering is performed at the low temperature of 200°C and the thickness is 448 nm. However, the higher refractive index of 2.55 and chemical stability of the TiO2 film in rutile phase are obtained via sintering temperature at 700°C.

  Info
Periodical
Key Engineering Materials (Volumes 368-372)
Edited by
Wei Pan and Jianghong Gong
Pages
1465-1467
DOI
10.4028/www.scientific.net/KEM.368-372.1465
Citation
C. J. Huang, K. C. Liao, Y. K. Su, "Structure Property of Titanium Dioxide Thin Films in Sintered Temperature by the Sol-Gel Method", Key Engineering Materials, Vols. 368-372, pp. 1465-1467, 2008
Online since
February 2008
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