Paper Title:
A Piezoelectric Micropump Based on MEMS Fabrication
  Abstract

This paper presents a valve-less micropump which is actuated by a piezoelectric ceramic chip. We employ a microelectromechanical system process for the silicon substrate and anodic bonding for assembly of the Pyrex glass and silicon wafer. The reciprocating type micropump contains two nozzle/diffuser elements and a silicon membrane with an embedded piezoelectric ceramic actuator.

  Info
Periodical
Key Engineering Materials (Volumes 368-372)
Edited by
Wei Pan and Jianghong Gong
Pages
215-217
DOI
10.4028/www.scientific.net/KEM.368-372.215
Citation
B. W. Wang, X. C. Chua, L. T. Li, "A Piezoelectric Micropump Based on MEMS Fabrication", Key Engineering Materials, Vols. 368-372, pp. 215-217, 2008
Online since
February 2008
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Price
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