Paper Title:
Pulsed Laser Deposition and Characterization of InZnO Alloyed Thin Film
  Abstract

High-quality In2O3 powder and ZnO powder had been used to make the ceramic target and the atomic ratio of 1 to 1 of indium and zinc had been prepared in this study. The alloyed thin films had been deposited on sapphire (001) substrates at different temperatures (100–600°C) by using pulsed laser deposition (PLD) technique. An x-ray diffractometer and an atomic force microscope were used to investigate the structural and morphological properties of the alloyed thin films. It was observed that the alloyed thin films deposited at the temperatures lower than 300°C were amorphous, and the alloyed thin films deposited at high temperatures were crystallized. A spectrophotometer was used to investigate the transmittances of the alloyed thin films. It was found that the alloyed thin films were of high quality. The band gap energies of the alloys were calculated by linear fitting the sharp absorption edges of the transmittance spectra. The Hall measurements were also carried out to identify the electrical properties of the thin films.

  Info
Periodical
Key Engineering Materials (Volumes 368-372)
Edited by
Wei Pan and Jianghong Gong
Pages
308-311
DOI
10.4028/www.scientific.net/KEM.368-372.308
Citation
F.K. Shan, G.X. Liu, B. C. Shin, W. J. Lee, W.T. Oh, "Pulsed Laser Deposition and Characterization of InZnO Alloyed Thin Film", Key Engineering Materials, Vols. 368-372, pp. 308-311, 2008
Online since
February 2008
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Xin Zhi Wang, Masaya Nishimoto, Toru Fujii, Kikuo Tominaga, Kei Ichiro Murai, Toshihiro Moriga, You Long Xu
Chapter 3: Materials for Electronics and Optoelectronics
Abstract:New transparent conducting oxide (TCO) materials, indium-gallium-zinc-oxide (IGZO) and indium-tin-zinc-oxide (ITZO) were deposited on glass...
197
Authors: Patthamapun Boonprakom, Watcharee Rattanasakulthong
Chapter 8: Semiconductors and Materials for Microelectronics
Abstract:Transparent conductive Al-doped zinc oxide (ZnO:Al) films with different sputtering power were prepared on glass substrate using an RF...
593