SrTiO3-based voltage-sensitive material was prepared successfully. The structure and properties were investigated using scanning electron microscopy, X-ray diffraction and X-ray photoelectron spectroscopy. It was observed that the average grain size was greater than 3μm and a cubic perovskite structure was obtained. XPS analysis of oxygen indicated that there existed multiform chemical state oxygen at the surface of the grain. Further researches shown that there were a few [AO12] polyhedrons and many cation vacancies in the material discussed, which demonstrated that a lot of oxygen volatilized and a well-known semiconductivity level was achieved.