Paper Title:
PVD-PECVD Hybrid Processes: Synthesis of Composite Thin Films and Process Understanding
  Abstract

After reviewing most of the recent developments performed on hybrid processes, basic physical phenomena of PVD-PECVD processes are detailed with the help of a model showing the different influences of main process parameters. Ti-Si-O and Zn-Si-O thin films are synthesized as possible examples of composite thin films. Limitations of the model developed are also discussed with respect to the composition and structure of deposited thin films.

  Info
Periodical
Key Engineering Materials (Volumes 373-374)
Main Theme
Edited by
M.K. Lei, X.P. Zhu, K.W. Xu and B.S. Xu
Pages
93-99
DOI
10.4028/www.scientific.net/KEM.373-374.93
Citation
T. Belmonte, A. Daniel, T. Duguet, "PVD-PECVD Hybrid Processes: Synthesis of Composite Thin Films and Process Understanding", Key Engineering Materials, Vols. 373-374, pp. 93-99, 2008
Online since
March 2008
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$32.00
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