PVD-PECVD Hybrid Processes: Synthesis of Composite Thin Films and Process Understanding |
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| Journal | Key Engineering Materials (Volumes 373 - 374) |
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| Volume | Surface Engineering |
| Edited by | M.K. Lei, X.P. Zhu, K.W. Xu and B.S. Xu |
| Pages | 93-99 |
| DOI | 10.4028/www.scientific.net/KEM.373-374.93 |
| Citation | Thierry Belmonte et al., 2008, Key Engineering Materials, 373-374, 93 |
| Online since | March, 2008 |
| Authors | Thierry Belmonte, A. Daniel, T. Duguet |
| Keywords | Composite, HMDSO, Hybrid Process, SiO2, Thin Film, Titania (TiO2), Zinc Oxide ZnO |
| Abstract | After reviewing most of the recent developments performed on hybrid processes, basic physical phenomena of PVD-PECVD processes are detailed with the help of a model showing the different influences of main process parameters. Ti-Si-O and Zn-Si-O thin films are synthesized as possible examples of composite thin films. Limitations of the model developed are also discussed with respect to the composition and structure of deposited thin films. |
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