Study on the Polishing Mechanism of Low Temperature Co-Fired Ceramic for Microsystem Application |
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| Journal | Key Engineering Materials (Volumes 375 - 376) |
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| Volume | Advances in Machining & Manufacturing Technology IX |
| Edited by | Yingxue Yao, Xipeng Xu and Dunwen Zuo |
| Pages | 47-51 |
| DOI | 10.4028/www.scientific.net/KEM.375-376.47 |
| Citation | Ji Jun Zhu et al., 2008, Key Engineering Materials, 375-376, 47 |
| Online since | March, 2008 |
| Authors | Ji Jun Zhu, Ju Long Yuan, Simon S. Ang |
| Keywords | Application, LTCC, Micro-Fluidic, Polishing |
| Abstract | Multilayer ceramics based on the low-temperature co-fired ceramics (LTCC) are gaining increasing interests in the manufacturing of highly-integrated systems for microelectronic and micro-system applications. The polishing experiments of sintered LTCC using a custom-built precision polishing machine are reported in this paper. First, a micro-fluidic distributor was fabricated using LTCC. Then, the polishing of this meso-MEMS system was studied using several polishing parameters. By optimizing the polishing parameters, the surface roughness can be reduced to 4 nm. |
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