A non-contact on-machine measurement system has been developed since various precise machines are getting lighter and smaller; therefore, processing with nano-precision is demanded recently. This system makes possible to measure with high precision without any damages and it is unnecessary for workpieces to attach or detach from a machine tool. Moreover, this system achieves on-machine form error compensation with high precision. On the other hand, the details of the system performances are still unknown. This study focuses on evaluating the performances by the comparison of the results that measured by this system and an existing measurement instrument under various conditions. As a result, this system shows an equivalent capability of measurement with high precision as the existing measurement instrument.