Paper Title:
A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator
  Abstract

In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.

  Info
Periodical
Key Engineering Materials (Volumes 381-382)
Edited by
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Pages
195-198
DOI
10.4028/www.scientific.net/KEM.381-382.195
Citation
Y. Arai, S.Y. Dian, W. Gao, "A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator", Key Engineering Materials, Vols. 381-382, pp. 195-198, 2008
Online since
June 2008
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