A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator
| Periodical | Key Engineering Materials (Volumes 381 - 382) |
|---|---|
| Main Theme | Measurement Technology and Intelligent Instruments VIII |
| Edited by | Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek |
| Pages | 195-198 |
| DOI | 10.4028/www.scientific.net/KEM.381-382.195 |
| Citation | Yoshikazu Arai et al., 2008, Key Engineering Materials, 381-382, 195 |
| Online since | June, 2008 |
| Authors | Yoshikazu Arai, S.Y. Dian, Wei Gao |
| Keywords | Actuator, Disturbance, Modeling Uncertainty, Sliding Mode Observer (SMO), Ultra-Precision Positioning |
| Price | US$ 28,- |
In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.