Paper Title:

A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator

Periodical Key Engineering Materials (Volumes 381 - 382)
Main Theme Measurement Technology and Intelligent Instruments VIII
Edited by Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Pages 195-198
DOI 10.4028/www.scientific.net/KEM.381-382.195
Citation Yoshikazu Arai et al., 2008, Key Engineering Materials, 381-382, 195
Online since June, 2008
Authors Yoshikazu Arai, S.Y. Dian, Wei Gao
Keywords Actuator, Disturbance, Modeling Uncertainty, Sliding Mode Observer (SMO), Ultra-Precision Positioning
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Abstract

In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.