Tactile and Optical Microsensors - Test Procedures and Standards |
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| Journal | Key Engineering Materials (Volumes 381 - 382) |
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| Volume | Measurement Technology and Intelligent Instruments VIII |
| Edited by | Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek |
| Pages | 23-26 |
| DOI | 10.4028/www.scientific.net/KEM.381-382.23 |
| Citation | Ulrich Neuschaefer-Rube et al., 2008, Key Engineering Materials, 381-382, 23 |
| Online since | June, 2008 |
| Authors | Ulrich Neuschaefer-Rube, Michael Neugebauer, W. Ehrig, Markus Bartscher, U. Hilpert |
| Keywords | Dimensional Measurement, Microsensors, Reference Standard, Test Procedure, Traceability |
| Abstract | This paper presents procedures and standards to test tactile and optical microsensors and micro-computed tomography (CT) systems. The tests are similar to the established tests for classical coordinate measuring machines and assess local and global sensor characteristics. For this purpose, adequate and miniaturized reference standards were manufactured, calibrated and tested. In addition, task-specific reference standards have been realized to determine special sensor characteristics such as the maximum slope angle measurable by optical sensors or specific errors of tactile-optical microprobes measuring deep microholes. |
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