Paper Title:
Eliminate of the Nonlinearity in Heterodyne Interferometer
  Abstract

A new approach is found to eliminate the nonlinearity of heterodyne interferometer. It uses a simple phase compensation system by rotating a polarizer which is set up before the detector in the interferometer. This method can be used in most science researches and the industry precision nanometer measurement, and it is valid for all nonlinearity errors whether it is a first-order or a higher-order error, or caused by any reasons.

  Info
Periodical
Key Engineering Materials (Volumes 381-382)
Edited by
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Pages
255-258
DOI
10.4028/www.scientific.net/KEM.381-382.255
Citation
W. M. Hou, L.Y. Shen, X. Ren, "Eliminate of the Nonlinearity in Heterodyne Interferometer", Key Engineering Materials, Vols. 381-382, pp. 255-258, 2008
Online since
June 2008
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Price
$32.00
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