AFM with the Slope Compensation Technique for High-Speed Precision Measurement of Micro-Structured Surfaces
| Periodical | Key Engineering Materials (Volumes 381 - 382) |
|---|---|
| Main Theme | Measurement Technology and Intelligent Instruments VIII |
| Edited by | Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek |
| Pages | 35-38 |
| DOI | 10.4028/www.scientific.net/KEM.381-382.35 |
| Citation | Yu Guo Cui et al., 2008, Key Engineering Materials, 381-382, 35 |
| Online since | June, 2008 |
| Authors | Yu Guo Cui, Bing Feng Ju, J. Aoki, Yoshikazu Arai, Wei Gao |
| Keywords | Atomic Force Microscope (AFM), Constant-Height Mode Scan, Micro Metrology, Microstructure, Nano Metrology, Slope Compensation |
| Price | US$ 28,- |
In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of high speed as well as faithful topographical image. Before scanning, the slope variation of the micro-structured surface was measured by the capacitance sensor and then stored in a PC. During the surface profile scanning, a piezoelectric actuator is applied which can provide the inconsecutive motion that corresponds to the pre-measured slope variation. As a result, the precision measurement can also be achieved. The validity of the proposed method and its performance are verified by compare the topographical images that were gained by the contact constant-force mode with feedback control. However, the scanning speed of our method is obviously high.
