Paper Title:
Optimal Design of Microaccelerometer
  Abstract

This paper presents a nonlinear optimization design of microaccelerometer. The sensitivity rates with respect to the structural sizes, for example, length, width, and depth, are simulated before we start the optimal design. Four types of microaccelerometers are investigated that the maxima sensitivity and bandwidth are taken into the design specification. The results meet the requirement of large bandwidth successfully.

  Info
Periodical
Key Engineering Materials (Volumes 381-382)
Edited by
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Pages
431-434
DOI
10.4028/www.scientific.net/KEM.381-382.431
Citation
Y. C. Liang, Y. P. Sun, "Optimal Design of Microaccelerometer", Key Engineering Materials, Vols. 381-382, pp. 431-434, 2008
Online since
June 2008
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Price
$32.00
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