Fabrication of Micro Tetrahedron Patterns Using Ultra-Precision Shaping System

Recently, ultra-precision machining of components and dies for information and communication industries, such as fresnel mirrors, diffraction lens, and die for super high intensity reflective sheet is one of the major target. To machine three-dimensional micro patterns, such as super high-intensity reflective sheets, ultra-precision and mirror surface fabrication processes are required. It has been reported, however, that continuous cutting, such as turning or shaping, is more suitable to ultra-precision machining. Many researchers have studied the manufacturing process of reflective sheet dies to obtain high form accuracy and surface quality. In this paper, ultra-precision shaping system was developed to fabricate micro patterns mechanically. In order to estimate performance of the shaping system, micro V-shaped grooves and tetrahedron pattern arrays for a super high intensity reflective sheet was applied. Also, a new measuring technology to inspect form and machining errors of a machined tetrahedron patterns was proposed. The results show that shaping system has a positioning accuracy of x, y, z axis with 100, 10, 10nm resolution, respectively. Micro V-shaped grooves could be machined at various depths and micro tetrahedron patterns with a good quality were obtained as well.