Development of the Precision Stage with Nanometer Accuracy and a Millimeter Dynamic Range
|
| Journal |
Key Engineering Materials (Volumes 381 - 382) |
| Volume |
Measurement Technology and Intelligent Instruments VIII |
| Edited by |
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek |
| Pages |
47-48 |
| DOI |
10.4028/www.scientific.net/KEM.381-382.47 |
| Online since |
June, 2008 |
| Authors |
D.H. Jeong,
Hyun Kyu Kweon,
Y.S. Kim
|
| Keywords |
Flexure Hinge, Multilayer PZT Actuator, Positioning System, Precision Stage |
| Abstract |
Most of the nano-positioning systems(stage) are accomplished by a flexure hinge
mechanism, which is two or three multilayer PZT actuators to realize the high accuracy and long
range[1]. In this paper, it can be made by a new nano stage with the bending characteristics of the
mechanical cantilever that is composed of the step motor, one multilayer PZT actuator and the
displacement sensor unit. The sensor unit consists of semiconductor LD, PD and sensor holder. The
displacement of stage is acquired by the bending control of the cantilever between the step motor
and the PZT actuator. The basic properties of the positioning stage are presented. From these
results, we can know that the new nano stage can be made by only one multilayer PZT actuator . |
| Full Paper |
Get the full paper by clicking here
|
| Preview |
Free first page example |
