Development of the Precision Stage with Nanometer Accuracy and a Millimeter Dynamic Range

Most of the nano-positioning systems(stage) are accomplished by a flexure hinge mechanism, which is two or three multilayer PZT actuators to realize the high accuracy and long range[1]. In this paper, it can be made by a new nano stage with the bending characteristics of the mechanical cantilever that is composed of the step motor, one multilayer PZT actuator and the displacement sensor unit. The sensor unit consists of semiconductor LD, PD and sensor holder. The displacement of stage is acquired by the bending control of the cantilever between the step motor and the PZT actuator. The basic properties of the positioning stage are presented. From these results, we can know that the new nano stage can be made by only one multilayer PZT actuator .