Paper Title:
A Planar Capacitive Sensor for Large Scale Measurement
  Abstract

A planar capacitive sensor (PCS) is proposed for X and Y directions measurement. One axial displacement can be measured without the coupling of another axial movement. Two groups electrodes with 90 degree out-of-phase, forming triangle sine and triangle cosine wave, can be applied for direction detection and interpolation, aiming at high resolution. Simulation results show that proposed PCS is available for planar measurement.

  Info
Periodical
Key Engineering Materials (Volumes 381-382)
Edited by
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Pages
509-512
DOI
10.4028/www.scientific.net/KEM.381-382.509
Citation
W. Wang, X.X. Li, Z. C. Chen, "A Planar Capacitive Sensor for Large Scale Measurement", Key Engineering Materials, Vols. 381-382, pp. 509-512, 2008
Online since
June 2008
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Price
$32.00
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