Self-Mixing Interferometer Based on Four-Bucket Integration Technique for Micro-Displacement Measurement |
| Journal |
Key Engineering Materials (Volumes 381 - 382) |
| Volume |
Measurement Technology and Intelligent Instruments VIII |
| Edited by |
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek |
| Pages |
53-56 |
| DOI |
10.4028/www.scientific.net/KEM.381-382.53 |
| Online since |
June, 2008 |
| Authors |
Dong Mei Guo,
Ming Wang
|
| Keywords |
Displacement Measurement, Self-Mixing Interferometer, Sinusoidal Phase Modulation |
| Abstract |
A novel self-mixing interference signal analysis method is proposed based on the use of an
electro-optic modulator (EOM). Self-mixing interference occurs in the laser cavity by reflecting the
light from a mirror-like target in front of the laser. Sinusoidal phase modulation of the beam is
obtained by an EOM in the external cavity. The phase of the interference signal is calculated by
four-bucket integration technique. The interferometer is applied to measure the displacement of a
high-precision commercial PZT with an accuracy of a few nanometers. |
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