Paper Title:
Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine
  Abstract

The today’s nanometrology limits the accuracy of the precision engineering. These limits are based on the meter definition as redefined in 1983. It is proposed to define precision mechatronics as the science and engineering of high level precision systems and machines. The paper describes a precision mechatronic machine. This device represents a long range positioning machine having a resolution of 0.1 nm over the range of 25 mm x 25 mm x 5 mm. The integration of several optical and tactile nanoprobes makes the 3D-nanopositioning suitable for various tasks. New developed nanoprobes (optical focus probe, nanoindenter, metrological scanning force microscope) and results of measurement will be presented.

  Info
Periodical
Key Engineering Materials (Volumes 381-382)
Edited by
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Pages
565-568
DOI
10.4028/www.scientific.net/KEM.381-382.565
Citation
G. Jäger, E. Manske, T. Hausotte, R. Mastylo, N. Dorozhovets, N. Hofmann, "Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine", Key Engineering Materials, Vols. 381-382, pp. 565-568, 2008
Online since
June 2008
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Price
$32.00
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