Paper Title:
Universal Designed Structures for Strict Pitch Measurements Using Scanning Probe Microscopes
  Abstract

An innovative two-dimensional (2D) grating was designed for precision pitch measurement using an atomic force microscope with laser interferometers (DLI-AFM). Two kinds of 2D gratings, cylindrical and octagonal pattern, were investigated and compared. In pitch analyses of these patterns, the latter octagonal pattern showed smaller fluctuation of pitch values, less than 0.1 nm. Therefore, one of the major uncertainty components, filtering parameter, was reduced dramatically. We propose the octagonal pattern is probably the most preferable pattern for accurate calibration on 2D gratings.

  Info
Periodical
Key Engineering Materials (Volumes 381-382)
Edited by
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Pages
605-606
DOI
10.4028/www.scientific.net/KEM.381-382.605
Citation
K. Sugawara, O. Sato, K. Yoshizaki, I. Misumi, S. Gonda, "Universal Designed Structures for Strict Pitch Measurements Using Scanning Probe Microscopes ", Key Engineering Materials, Vols. 381-382, pp. 605-606, 2008
Online since
June 2008
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Price
$32.00
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