The Influence of Form Deviations and Surface Topography of Micro-Components on the Uncertainty of their Geometrical Parameters |
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| Journal | Key Engineering Materials (Volumes 381 - 382) |
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| Volume | Measurement Technology and Intelligent Instruments VIII |
| Edited by | Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek |
| Pages | 649-652 |
| DOI | 10.4028/www.scientific.net/KEM.381-382.649 |
| Citation | Michael Neugebauer et al., 2008, Key Engineering Materials, 381-382, 649 |
| Online since | June, 2008 |
| Authors | Michael Neugebauer, Michael Paul Krystek |
| Keywords | Data Analysis, Form Influence, Micro Metrology, Uncertainty |
| Abstract | The uncertainty of dimensional measurements is influenced by numerous different sources, such as the properties of the instrument used, the environmental conditions, the interaction between sensor and surface, and the object properties themselves. In our contribution we focus on the influence of form deviations and surface topography. This influence will be demonstrated by some characteristic examples of micro-component measurements and by the analysis of simulated 2D-data. |
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