Dimensional Measurements for Micro- and Nanotechnology |
| Journal |
Key Engineering Materials (Volumes 381 - 382) |
| Volume |
Measurement Technology and Intelligent Instruments VIII |
| Edited by |
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek |
| Pages |
7-10 |
| DOI |
10.4028/www.scientific.net/KEM.381-382.7 |
| Online since |
June, 2008 |
| Authors |
Gao Liang Dai,
F. Pohlenz,
H.U. Danzebrink,
L. Koenders
|
| Keywords |
Atomic Force Microscopy (AFM), Calibration, Coordinate Metrology, Line Edge Roughness, Micro Gear, Micro Hole, Microtechnology, Nanotechnology, Sidewall, Surface Measurement, Traceability, True Three Dimensional Measurement |
| Abstract |
Metrology plays an important role in the development and commercialisation of micro and
nanotechnology. For calibrating versatile micro- and nanoscale standards, a dimensional metrology
instrument coupled with multi sensor heads including atomic force microscope (AFM), tactile stylus,
laser focus sensor and assembled cantilever probes (ACPs) has been developed. Two kinds of ACPs
are highlighted in the paper. One is fabricated by gluing a vertical AFM cantilever to a horizontal
AFM cantilever using micro assembling techniques. It is applicable for direct and non-destructive
measurements of sidewall surfaces. The other is an ACP ball probe designed for true 3D
measurements of micro structures. It is realised by gluing a tungsten wire with a probing sphere ball,
40 ... 120 µm in diameter, to a horizontal AFM cantilever. The ACP ball probe has advantages such as
small probing forces (<1µN) and high probing sensitivity. Some typical calibrations on micro and
nano structures such as step height, grating and sphere calotte artefact are introduced. |
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