Paper Title
Page
Authors: Ming Chang, C.H. Lin, Juti Rani Deka
Abstract:Nanostructures materials have stimulated broad attention in the past decade because of their potential fundamental characteristics and its...
31
Authors: Yu Guo Cui, Bing Feng Ju, J. Aoki, Yoshikazu Arai, Wei Gao
Abstract:In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of...
35
Authors: Y. Tan, S. Zhang
Abstract:We demonstrate a method of displacement measurement based on Nd:YAG laser with birefringence external cavity. The measurement system is...
39
Authors: Seong Gu Kang, J.P. La, H.S. Yoon, D.Y. Choi, K.H. Park
Abstract:A new synthetic heterodyne laser Doppler interferometer based on homodyne interferometer is addressed in this work. Interference signal...
43
Authors: D.H. Jeong, Hyun Kyu Kweon, Y.S. Kim
Abstract:Most of the nano-positioning systems(stage) are accomplished by a flexure hinge mechanism, which is two or three multilayer PZT actuators to...
47
Authors: X.J. Wan, Shu Lian Zhang
Abstract:In this paper, we report a novel quasi-common-path laser feedback interferometer (QLFI) for highly stable, high-resolution and non-contact...
49
Authors: Dong Mei Guo, Ming Wang
Abstract:A novel self-mixing interference signal analysis method is proposed based on the use of an electro-optic modulator (EOM). Self-mixing...
53
Authors: Cong Yu Xu, Xiao Fen Yu
Abstract:This paper has developed the bimodal USM a novel actuation pattern, which can actuate the bimodal USM in nanometer magnitude with single...
57
Authors: Roman V. Romashko, Yuri Kulchin, S.D. Girolamo, A. Kamshilin, J.C. Launay
Abstract:Adaptive fiber-optic interferometer which is based on multimode optical fiber as a sensor and diffusion holograms recorded in semiconductor...
61
Authors: Hui Zhang, Z. Cai, K.C. Fan
Abstract:This paper develops a new separated mini-environment to provide a constant temperature chamber for the placement of Micro/Nano-metrology...
65
Showing 11 to 20 of 167 Paper Titles