Effect of Gel-Films-Thickness and Sintering Conditions on the Crystal Structure and Microstructure of Alkoxy-Derived BaTiO3 Thin Films |
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| Journal | Key Engineering Materials (Volume 388) |
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| Volume | Electroceramics in Japan XI |
| Edited by | Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki |
| Pages | 171-174 |
| DOI | 10.4028/www.scientific.net/KEM.388.171 |
| Citation | Kiyotaka Tanaka et al., 2008, Key Engineering Materials, 388, 171 |
| Online since | September, 2008 |
| Authors | Kiyotaka Tanaka, Kazuyuki Suzuki, Kazumi Kato |
| Keywords | BaTiO3, Densification, Gel Film, Heating Rate, Sol-Gel Process, Thickness |
| Abstract | Various BaTiO3 thin films were fabricated at 650oC by using different conditions such as the heating rate and alkoxy-derived gel-film thickness. In this study, the spin-coating and calcination step were repeated several times to control the gel-films thickness. And then the one-sintering was carried out with various heating rates. BaTiO3 films with perovskite phase were obtained by using the heating rate of 100oC/sec and the surface morphology became rough with increase of gel-film thickness. We considered that the change of root mean square (rms) roughness and cross-sectional profiles by various heating rates was caused by densification. |
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