Paper Title:
Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition
  Abstract

To retain the driving properties of metal-based micro optical scanner derived by aerosol deposition (AD) technique, CO2 laser irradiation was used to anneal the PZT films deposited onto the stainless-steel substrate. Stainless-steel mirror and frame of the scanner with the film annealed by laser irradiation maintained their metallic luster. The scanner with the film annealed by laser irradiation at 600 °C for 1 min has a scanning angle over 30 degree that is comparable with the scanning angle of a similar scanner annealed by electric furnace at 600 °C for 10 min.

  Info
Periodical
Edited by
Kazumi Kato, Tadashi Takenaka, Masasuke Takata and Kazuo Shinozaki
Pages
195-198
DOI
10.4028/www.scientific.net/KEM.388.195
Citation
S. Baba, J. H. Park, H. Sato, S. Nakano, K. Ashida, J. Akedo, "Laser-Anneal of Metal-Based Micro Optical Scanner Derived by Aerosol Deposition", Key Engineering Materials, Vol. 388, pp. 195-198, 2009
Online since
September 2008
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Tsunenobu Kimoto, H. Kawano, Masato Noborio, Jun Suda, Hiroyuki Matsunami
Abstract:Oxide deposition followed by high-temperature annealing in N2O has been investigated to improve the quality of 4H-SiC MOS structures....
987
Authors: Hyeong Ho Park, Hyung Ho Park, Ho Jung Chang, Hyeong Tag Jeon
Abstract:The ferroelectric properties of UV irradiated and non-irradiated SBT thin films using photosensitive starting precursors were investigated....
1061
Authors: Zhan Jun Yu, Peng Fei Guo, Rong Can Yin, Yu Min Cui
Chapter 1: Frontiers of Nanoscience and Technology
Abstract:The nanoflakes Co(OH)2 porous films have been successfully electrodeposited on nickel foam and nickel foil substrates from cobalt nitrate...
332
Authors: Xiang Yang Ma, Li Ming Fu, De Ren Yang
Chapter 7: Defects and Interfaces
Abstract:Oxygen precipitation (OP) behaviors were investigated for Czochralski (Cz) silicon wafers, which were coated with silicon nitride (SiNx)...
249
Authors: Xin Dong, Jin Wang, Hui Wang, Zhi Feng Shi, Bao Lin Zhang
Chapter 01: Organization, Defects and Performance of Material
Abstract:NiZnO films were grown on sapphire substrates by metal-organic chemical vapor deposition (MOCVD). Then the films were annealed in vacuum at...
11