Measurement of High-NA Axisymmetric Aspherical Surface with Continuous Interference Method
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| Journal |
Key Engineering Materials (Volumes 389 - 390) |
| Volume |
Advances in Abrasive Technology XI |
| Edited by |
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara |
| Pages |
102-107 |
| DOI |
10.4028/www.scientific.net/KEM.389-390.102 |
| Online since |
September, 2008 |
| Authors |
Y. Nagaike, Tsunemoto Kuriyagawa, Wei Gao, Ji Wang Yan, Nobuhito Yoshihara |
| Keywords |
Aspheric Surface, Continuous Interference Method, High-NA, Interferometer, Phase Shifting Method, Precision Measurement |
| Abstract |
The measurement principle where in a high-NA (Numerical Aperture) surface, for which
the degree of the angle of surface inclination exceeds π/3 radians, could be evaluated with high
precision and high speed is proposed. This is based on the stitching method, where aspherical surface
measurement becomes possible by dividing the surface of the sample into a range so that
measurements can be made with an interferometer and finally combined. We examine the method of
applying an interferometer to the condition in which the sample is rotated on an air spindle at a
constant speed. It is not necessary in this method to make the sample static. Therefore, the vibration of
the servo motor and any location errors can be eliminated. Moreover, the measurement time does not
depend on the number of divided areas which are necessary for the stitching method, allowing for
high-speed measurement. The principle behind this technique is expanded first, and an experiment
system based on it was constructed. The principle proposed was evaluated, and its effectiveness was
confirmed. |
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