Paper Title:
Measurement of High-NA Axisymmetric Aspherical Surface with Continuous Interference Method
  Abstract

The measurement principle where in a high-NA (Numerical Aperture) surface, for which the degree of the angle of surface inclination exceeds π/3 radians, could be evaluated with high precision and high speed is proposed. This is based on the stitching method, where aspherical surface measurement becomes possible by dividing the surface of the sample into a range so that measurements can be made with an interferometer and finally combined. We examine the method of applying an interferometer to the condition in which the sample is rotated on an air spindle at a constant speed. It is not necessary in this method to make the sample static. Therefore, the vibration of the servo motor and any location errors can be eliminated. Moreover, the measurement time does not depend on the number of divided areas which are necessary for the stitching method, allowing for high-speed measurement. The principle behind this technique is expanded first, and an experiment system based on it was constructed. The principle proposed was evaluated, and its effectiveness was confirmed.

  Info
Periodical
Key Engineering Materials (Volumes 389-390)
Edited by
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara
Pages
102-107
DOI
10.4028/www.scientific.net/KEM.389-390.102
Citation
Y. Nagaike, T. Kuriyagawa, W. Gao, J. W. Yan, N. Yoshihara, "Measurement of High-NA Axisymmetric Aspherical Surface with Continuous Interference Method ", Key Engineering Materials, Vols. 389-390, pp. 102-107, 2009
Online since
September 2008
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Yung Cheng Wang, Chiun Jie Lin, Chao Jung Chen, Huay Chung Liou
Abstract:Precision positioning is an essential basis for precision mechanical engineering, such as positioning for precision manufacture, or...
768
Authors: Jian Xin Zhu, Zeng Liang Gao
Abstract:The measurement of crack propagation in solids is of vital importance for the research of the fatigue characteristic of solid materials. By...
2606
Authors: Qi Liu, Yu Lan Wei, Bing Li, Zhi Feng Han, Meng Dan Jin
Chapter 1: Mechanical Engineering
Abstract:In the light of the shortcoming that gears traditional measurement methods not only consume time and labor, but also have a great contrived...
280
Authors: Ling Yang, Lei Chen, Hai Jun Tang, Pei Zhao
Chapter 1: Advanced Technologies in Mechanical and Manufacturing Engineering
Abstract:With the rapid development of gear, gear measurement accuracy must meet the actual demand. For this problem, through the analysis of the...
340
Authors: Jin Qi Ren, Yao Hua Li, Qiong Xuan Ge, Xun Ma, Lu Zhao
Chapter 13: Vehicle Engineering
Abstract:In high speed train, to obtain precise speed is important to high performance control, though the transducers used in the train are usually...
2052