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Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools

Journal Key Engineering Materials (Volumes 389 - 390)
Volume Advances in Abrasive Technology XI
Edited by Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara
Pages 144-150
DOI 10.4028/www.scientific.net/KEM.389-390.144
Citation Tsutomu Ohta et al., 2008, Key Engineering Materials, 389-390, 144
Online since September, 2008
Authors Tsutomu Ohta, Ji Wang Yan, Sunao Kodera, Shuuma Yajima, Naoyuki Horikawa, Youichi Takahashi, Tsunemoto Kuriyagawa
Keywords Coolant, Diamond Turning, Ductile Cutting, Infrared Lens, Single Crystal Silicon, Tool Wear
Abstract

The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.

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