Coolant Effects on Tool Wear in Machining Single-Crystal Silicon with Diamond Tools
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| Journal |
Key Engineering Materials (Volumes 389 - 390) |
| Volume |
Advances in Abrasive Technology XI |
| Edited by |
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara |
| Pages |
144-150 |
| DOI |
10.4028/www.scientific.net/KEM.389-390.144 |
| Online since |
September, 2008 |
| Authors |
Tsutomu Ohta, Ji Wang Yan, Sunao Kodera, Shuuma Yajima, Naoyuki Horikawa, Youichi Takahashi, Tsunemoto Kuriyagawa |
| Keywords |
Coolant, Diamond Turning, Ductile Cutting, Infrared Lens, Single Crystal Silicon, Tool Wear |
| Abstract |
The service life of a diamond tool in cutting single-crystal silicon is normally very short
because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool
wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon
machining by investigating cutting forces and tool wear geometries. The water-based coolant was
found to restrain flank wear more effectively than the oil-based one. The effective tool life using the
water-based one was averagely three times longer than that using the oil-based one. The tool wear
mechanism might be related to microplasma generated between silicon and diamond during cutting. |
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