Fabrication of High-Aspect Ratio Micro Holes on Hard Brittle Materials
-Study on Electrorheological Fluid-Assisted Micro Ultrasonic Machining-
|
| Journal |
Key Engineering Materials (Volumes 389 - 390) |
| Volume |
Advances in Abrasive Technology XI |
| Edited by |
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara |
| Pages |
264-270 |
| DOI |
10.4028/www.scientific.net/KEM.389-390.264 |
| Online since |
September, 2008 |
| Authors |
T. Tateishi, Nobuhito Yoshihara, Ji Wang Yan, Tsunemoto Kuriyagawa |
| Keywords |
Abrasive Grain, Electrorheological Fluid, Hard-Brittle Materials, High Aspect Ratio, Micro Hole, Ultrasonic Machining |
| Abstract |
Ultrasonic machining (USM) is an effective method for machining of hard brittle
materials. In this process, the slurry is supplied to the gap between the workpiece and the ultrasonic
vibrating tool, and the materials are removed by the impacts of the abrasive grains that are
pressurized by an ultrasonic vibrating tool. The purpose of this research is to achieve precise and
efficient microfabrication on hard brittle materials by USM. However, in the case of
microfabrication, chipping which is generally observed around the edges of machined micro holes
and grooves, deteriorates the machining accuracy. In addition, there is another problem in that the
machining efficiency decreases with the progress of the machining. Electrorheological
fluid-assisted USM has been proposed as a countermeasure to these problems. In the present study,
the problems and countermeasures associated with the machining of high-aspect ratio micro holes
in hard brittle materials by electrorheological fluid-assisted USM are investigated. By positioning
an auxiliary electrode under the workpiece, it becomes possible to keep the electric field high even
when the machining depth becomes large. As a result, high-precision and high-aspect ratio micro
holes can be machined on hard brittle materials. |
| Full Paper |
Get the full paper by clicking here
|
