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A Preliminary Study of the Erosion Process in Micro-Machining of Glasses with a Low Pressure Slurry Jet

Journal Key Engineering Materials (Volumes 389 - 390)
Volume Advances in Abrasive Technology XI
Edited by Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara
Pages 375-380
DOI 10.4028/www.scientific.net/KEM.389-390.375
Online since September, 2008
Authors Thai Nguyen, King Pang, Jun Wang
Keywords Abrasive Jet, Erosion, Micro Hole Feature, Micro Machining, Microjet, Surface Characteristic, Wavy Pattern
Abstract The erosion process in micro-machining of brittle glasses using a low pressure slurry jet is discussed. The process capability of the technique is assessed by examining the machined surface integrity in relation to fluid flow dynamics in micro-hole generations. The holes produced are characterised by a “W” shape in the cross section, while the surface morphology is distinguished by three zones associated with the fluid flow behaviour, i.e. a direct impact zone, a wavy zone and an accumulation zone. The surfaces appear to be smooth and without cracks, indicating a predominance of the ductile mode erosion process. With the increase of pressure, the erosion rates can be enhanced as a result of the expending of the accumulation zone while the outer diameter of the holes remains unchanged. This study shows that this technique can be used for micro-machining with high surface quality, and provides an essential understanding for further research in the avenue.
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