Paper Title:
Design of Double Nozzle Type Powder Jet Device Optimized for PJD
  Abstract

Thick films are needed in micro-electro-mechanical systems (MEMS) as insulation, piezoelectric and ferroelectric materials. To form the thick film, powder jet deposition (PJD) method has been proposed. In the PJD process, microparticles are sprayed out from nozzle under the conditions of room temperature and atmospheric pressure, and make a film on the substrate. We have developed a new jet mechanism of double-nozzle type, and reported its results previously [1]. In this study, we optimized the shape of the nozzle through investigating the influence of different dimensions and shape of the nozzle on the particles blasting velocity. As a result, it is found that nozzle diameter has a large affect on particles velocity.

  Info
Periodical
Key Engineering Materials (Volumes 389-390)
Edited by
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara
Pages
398-403
DOI
10.4028/www.scientific.net/KEM.389-390.398
Citation
T. Shibuya, M. S. Sepasy, K. Mizutani, N. Yoshihara, J. W. Yan, T. Kuriyagawa, "Design of Double Nozzle Type Powder Jet Device Optimized for PJD", Key Engineering Materials, Vols. 389-390, pp. 398-403, 2009
Online since
September 2008
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Price
$32.00
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