The Deformation Mechanism at Pop-In: Monocrystalline Silicon under Nanoindentation with a Berkovich Indenter |
| Journal |
Key Engineering Materials (Volumes 389 - 390) |
| Volume |
Advances in Abrasive Technology XI |
| Edited by |
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara |
| Pages |
453-458 |
| DOI |
10.4028/www.scientific.net/KEM.389-390.453 |
| Online since |
September, 2008 |
| Authors |
Li Chang, Liang Chi Zhang |
| Keywords |
Mechanical Property, Mono-Crystalline Silicon, Nanoindentation, Phase Transition |
| Abstract |
This paper investigates the “pop-in” behavior of monocrystalline silicon under
nanoindentation with a Berkovich indenter. The indentation tests were carried out under ultra-low
loads, i.e. 100 μN and 300 μN, with different loading/unloading rates. It was found that with the
experimentally determined area function of the indenter tip, the mechanical properties of silicon can
be accurately calculated from the load-displacement data, that a pop-in event represents the onset of
phase transition, and that a lower loading rate favours a sudden volume change but a rapid loading
process tends to generate a gradual slope change of the load-displacement curve. |
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