Paper Title:
Subsurface Structures of Monocrystalline Silicon Generated by Nanogrinding
  Abstract

This paper reports the effect of nanogrinding conditions on the formation of subsurface structures of monocrystalline silicon (100) substrates. It was found that the amorphization and the transformation of high pressure phases were related to the grit depth of cut employed in nanogrinding. The formation mechanisms were found to be different from those previously reported from the nanoindentation studies.

  Info
Periodical
Key Engineering Materials (Volumes 389-390)
Edited by
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara
Pages
465-468
DOI
10.4028/www.scientific.net/KEM.389-390.465
Citation
H. Huang, Y.Q. Wu, Y. Wang, J. Zou, L. B. Zhou, "Subsurface Structures of Monocrystalline Silicon Generated by Nanogrinding", Key Engineering Materials, Vols. 389-390, pp. 465-468, 2009
Online since
September 2008
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$32.00
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