Subsurface Structures of Monocrystalline Silicon Generated by Nanogrinding |
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| Journal | Key Engineering Materials (Volumes 389 - 390) |
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| Volume | Advances in Abrasive Technology XI |
| Edited by | Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara |
| Pages | 465-468 |
| DOI | 10.4028/www.scientific.net/KEM.389-390.465 |
| Citation | Han Huang et al., 2008, Key Engineering Materials, 389-390, 465 |
| Online since | September, 2008 |
| Authors | Han Huang, Y.Q. Wu, Y. Wang, Jin Zou, Li Bo Zhou |
| Keywords | Nanogrinding, Nanoscratch, Removal Mechanism, Silicon, Subsurface Damage |
| Abstract | This paper reports the effect of nanogrinding conditions on the formation of subsurface structures of monocrystalline silicon (100) substrates. It was found that the amorphization and the transformation of high pressure phases were related to the grit depth of cut employed in nanogrinding. The formation mechanisms were found to be different from those previously reported from the nanoindentation studies. |
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