Paper Title:
Effect of Conditioning Parameters on Surface Non-Uniformity of Polishing Pad in Chemical Mechanical Planarization
  Abstract

The calculating model of surface non-uniformity of polishing pad and the kinematical model between polishing pad and conditioner are initially established. Then the effects of several conditioning parameters were investigated by using the two models. The results of simulation and calculation show that the width ratio of diamond band of conditoner and the rotation speed at the same speed ratio between pad and conditioner have little effect on the surface non-uniformity of polishing pad, while at high non-integer rotation speed ratio, the surface non-uniformity of polishing pad is better than that at low integer speed ratio. The research results are available to select appropriate conditioning parameters especially for the stringent requirement of within-wafer non-uniformity in next generation IC.

  Info
Periodical
Key Engineering Materials (Volumes 389-390)
Edited by
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara
Pages
498-503
DOI
10.4028/www.scientific.net/KEM.389-390.498
Citation
N. Qin, D. M. Guo, R. K. Kang, F. W. Huo, "Effect of Conditioning Parameters on Surface Non-Uniformity of Polishing Pad in Chemical Mechanical Planarization", Key Engineering Materials, Vols. 389-390, pp. 498-503, 2009
Online since
September 2008
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Price
$32.00
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