Paper Title:
Scale Effect of Nano-Indentation of Silicon – A Molecular Dynamics Investigation
  Abstract

This paper investigates the scale effect of indenter tip radius on the deformation of silicon under nanoindentation using molecular dynamics simulation. It was found that with larger diamond tips a six-coordinated silicon phase different from β-silicon on loading and a diamond like crystal beneath the indenter on unloading would appear as a result of the indentation stressing. This is a new phenomenon that has not been observed previously.

  Info
Periodical
Key Engineering Materials (Volumes 389-390)
Edited by
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara
Pages
521-526
DOI
10.4028/www.scientific.net/KEM.389-390.521
Citation
K. Mylvaganam, L. C. Zhang, "Scale Effect of Nano-Indentation of Silicon – A Molecular Dynamics Investigation", Key Engineering Materials, Vols. 389-390, pp. 521-526, 2009
Online since
September 2008
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Price
$32.00
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