Scale Effect of Nano-Indentation of Silicon – A Molecular Dynamics Investigation |
| Journal |
Key Engineering Materials (Volumes 389 - 390) |
| Volume |
Advances in Abrasive Technology XI |
| Edited by |
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara |
| Pages |
521-526 |
| DOI |
10.4028/www.scientific.net/KEM.389-390.521 |
| Online since |
September, 2008 |
| Authors |
Kausala Mylvaganam, Liang Chi Zhang |
| Keywords |
Indentation, Molecular Dynamic, Scale Effect, Silicon |
| Abstract |
This paper investigates the scale effect of indenter tip radius on the deformation of silicon
under nanoindentation using molecular dynamics simulation. It was found that with larger diamond
tips a six-coordinated silicon phase different from β-silicon on loading and a diamond like crystal
beneath the indenter on unloading would appear as a result of the indentation stressing. This is a
new phenomenon that has not been observed previously. |
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