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Scale Effect of Nano-Indentation of Silicon – A Molecular Dynamics Investigation

Journal Key Engineering Materials (Volumes 389 - 390)
Volume Advances in Abrasive Technology XI
Edited by Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara
Pages 521-526
DOI 10.4028/www.scientific.net/KEM.389-390.521
Citation Kausala Mylvaganam et al., 2008, Key Engineering Materials, 389-390, 521
Online since September, 2008
Authors Kausala Mylvaganam, Liang Chi Zhang
Keywords Indentation, Molecular Dynamics (MD), Scale Effect, Silicon
Abstract

This paper investigates the scale effect of indenter tip radius on the deformation of silicon under nanoindentation using molecular dynamics simulation. It was found that with larger diamond tips a six-coordinated silicon phase different from β-silicon on loading and a diamond like crystal beneath the indenter on unloading would appear as a result of the indentation stressing. This is a new phenomenon that has not been observed previously.

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