Scale Effect of Nano-Indentation of Silicon – A Molecular Dynamics Investigation |
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| Journal | Key Engineering Materials (Volumes 389 - 390) |
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| Volume | Advances in Abrasive Technology XI |
| Edited by | Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara |
| Pages | 521-526 |
| DOI | 10.4028/www.scientific.net/KEM.389-390.521 |
| Citation | Kausala Mylvaganam et al., 2008, Key Engineering Materials, 389-390, 521 |
| Online since | September, 2008 |
| Authors | Kausala Mylvaganam, Liang Chi Zhang |
| Keywords | Indentation, Molecular Dynamics (MD), Scale Effect, Silicon |
| Abstract | This paper investigates the scale effect of indenter tip radius on the deformation of silicon under nanoindentation using molecular dynamics simulation. It was found that with larger diamond tips a six-coordinated silicon phase different from β-silicon on loading and a diamond like crystal beneath the indenter on unloading would appear as a result of the indentation stressing. This is a new phenomenon that has not been observed previously. |
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