Study on the Subsurface Damage of Single Crystal MgO Substrates |
| Journal |
Key Engineering Materials (Volumes 389 - 390) |
| Volume |
Advances in Abrasive Technology XI |
| Edited by |
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara |
| Pages |
7-12 |
| DOI |
10.4028/www.scientific.net/KEM.389-390.7 |
| Online since |
September, 2008 |
| Authors |
Zhi Gang Dong,
Ren Ke Kang,
Zhen Yuan Jia
|
| Keywords |
Cross-Section, Dislocation, Microcrack, Single Crystal MgO, Slip, Subsurface Damage |
| Abstract |
Single crystal MgO can be used as the substrates to deposit HTS films. The subsurface
damage (SSD) generated in processing has great effect on the strength and performance of the
substrates. However, the characteristics of MgO SSD and its formation mechanism have not been
understood fully. In this paper, the surface and subsurface damage caused by saw cutting, rough
lapping and fine lapping of MgO substrates were studied by cross-section of microscopy and SEM.
The formation mechanism was discussed; and a SSD model was presented. |
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