Control of Nano-Topography on an Axisymmetric Ground Surface |
| Journal |
Key Engineering Materials (Volumes 389 - 390) |
| Volume |
Advances in Abrasive Technology XI |
| Edited by |
Tsunemoto Kuriyagawa, Libo Zhou, Jiwang Yan and Nobuhito Yoshihara |
| Pages |
96-101 |
| DOI |
10.4028/www.scientific.net/KEM.389-390.96 |
| Online since |
September, 2008 |
| Authors |
Nobuhito Yoshihara, Ji Wang Yan, Tsunemoto Kuriyagawa |
| Keywords |
Nanotopography, Ultra-Precision Grinding, Vibration |
| Abstract |
The use of aspherical optical parts has become common as optical instruments are
becoming smaller with and are achieving higher resolution. Nano-order roughness and high-precision
shapes are simultaneously required for the surface of aspherical optical parts. At present, form
accuracy of the aspherical lens becomes less than 50 nm, and the maximum height roughness
becomes less than 20 nm. These values of form accuracy and maximum height roughness satisfy the
requirement for most precision optical parts. However, nano-topography, which causes grinding
marks and deteriorates accuracy of optical parts, is generated on the ground surface. Conventional
evaluation criteria such as form accuracy and surface roughness cannot estimate the
nano-topography. In the present paper, the cross sectional profile of the axisymmetric ground surface
is calculated in order to estimate the distribution of the nano-topography. As a result, the possibility of
control of the nano-topography distribution is confirmed. In addition, controlling the amplitude of
nano-topography is easier than controlling the distribution of nano-topography. |
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