Paper Title:
Research on Electrode Wear Prediction and Compensation On-Line Technology for Micro EDM Application
  Abstract

A micro-EDM equipment which can fabricate three-dimensional micro-structures is developed. A method of electrode wear compensation on-line which is very important to micro 3D structures machined by micro-EDM is presented. In this method, the wear of electrode can be predicted by the statistics law of open rate of discharge status, therefore, its precise model which is very difficult to build as well as the special CAD/CAM system is hardly necessary. At the same time, the micro-EDM CAD/CAM technology which applies the universal CAD/CAM software for milling is also researched and experienced on Unigraphics (UG). At last, micro 3D structures, a micro hemisphere with diameter ∅150+m and a micro 3D beam which is very popular in MEMS, are machined on silicon wafer by this way, which proves the wide useful of this method and the promising application in MEMS.

  Info
Periodical
Key Engineering Materials (Volumes 392-394)
Edited by
Guanglin Wang, Huifeng Wang and Jun Liu
Pages
166-171
DOI
10.4028/www.scientific.net/KEM.392-394.166
Citation
Y. Zhang, Z. L. Wang, Z.Y. Li, W. S. Zhao, "Research on Electrode Wear Prediction and Compensation On-Line Technology for Micro EDM Application", Key Engineering Materials, Vols. 392-394, pp. 166-171, 2009
Online since
October 2008
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Price
$32.00
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