Thermal properties of SiC at the micrometer-scale were measured quantitatively with a thermal microscope using thermo-reflectance and periodic heating techniques. In this study, SiC single crystal and polycrystal were investigated. The small values of standard deviation suggest that the SiC single crystal had constant thermal conductivities. For the single crystal, the average value of the thermal conductivity at the micrometer-scale was in good agreement with the macro-scale thermal conductivity value obtained by the laser flash technique. On the other hand, thermal conductivity of the polycrystal was heterogeneous at the micrometer-scale. An average thermal conductivity value of 257 Wm-1K-1 was obtained within an area of 50 m ×100 µm. The highest and lowest values of the thermal conductivity from the polycrystal were 300 and 220 Wm-1K-1, respectively.