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Authors: Takafumi Kusunose, Tohru Sekino
Abstract:Two types of Aluminum nitride (AlN) based ceramic nanocomposite with multifunctionality were investigated to improve machinability or...
45
Authors: Naohito Yamada, Jun Yoshikawa, Yuji Katsuda, Hiroaki Sakai
Abstract:Aluminum Nitride (AlN) ceramics are used as wafer heating plates and wafer holding electrostatic chucks in semiconductor fabrication...
49
Authors: Hiroyuki Miyazaki, Hideki Hyuga, Yuichi Yoshizawa, Kiyoshi Hirao, Tatsuki Ohji
Abstract:Six kinds of silicon nitrides with different microstructures were fabricated by changing the amount of sintering additives, Al2O3 and Y2O3. ...
53
Authors: Junichi Takahashi, Takayuki Suehiro
Abstract:Oxidation behavior of R4Si2O7N2 (J-phase; R = Y and rare-earth element) has been investigated by thermometric measurements in air. All...
57
Authors: Hyeon Keun Lee, Do Kyung Kim
Abstract:The high thermal conductivity of Aluminum nitride, coupled with its high electrical resistivity and nontoxic nature, makes it a very...
61
Authors: Sang Kee Lee, Ikuko Yamada, Shoichi Kume, Hiromi Nakano, Koji Watari
Abstract:The thermal conductivity at the micrometer-scale of AlN ceramics with eliminated grain boundary phase was measured by the thermoreflectance...
65
Authors: Noritaka Saito, Daiji Nakata, Sohei Sukenaga, Kunihiko Nakashima
Abstract:Viscosities of molten RE-Mg-Si-O-N (RE=Y, Gd, Nd and La) glasses have been measured using rotating bob viscometer with a gas tight furnace at...
69
Authors: Isao Tanaka, Akihide Kuwabara, Koretaka Yuge, Atsuto Seko, Fumiyasu Oba, Katsuyuki Matsunaga
Abstract:The phase stability of silicon nitride is examined using a series of first principles phonon calculations. -phase shows slightly higher free...
73
Authors: Peter Kroll
Abstract:A combination of first-principle and thermochemical calculations is applied to compute the phase diagrams of rhenium-nitrogen and of...
77
Showing 11 to 20 of 75 Paper Titles