Micro drilling experiments of glass by Micro Abrasive Suspension Jets (MASJ) were carried out. The influence of the nozzle and compositions of slurry including the selection of abrasives, suspending agents and their concentrations on material removal, the depth and the diameter of the machined holes were investigated for glass drilling. Four processing stages are provided to describe the erosion profile characteristics. The suspension properties of slurry play an important role in MASJ machining. Five million molecular weight non-ionic polyacrylamide with concentration of 0.6% , white corundum abrasive and the longest length of the nozzle cylindercal zone can achieve lager material removal and better quality of hole in MASJ machining.