Paper Title:
The Modeling and Simulation of Pneumatic Loading System of Double-Sided Polishing Machine
  Abstract

Double-sided polishing machine is widely used to high precision dimension, high accuracy surface, and ultra-smooth surface without damage layer for some hard and brittle workpiece such as silicon wafer, sapphire, ceramic, magnetic substrates, electronic materials, etc. Pneumatic loading system is the very crucial part of the double-sided polishing machine. The polishing machine’s performances are directly determined by the loading precision. This paper establishes the modeling and simulation of pneumatic load system by AMESim and then gives optimization parameters to improve system performance, and the cure of load capacity is given.

  Info
Periodical
Edited by
Bo Zhao, Xipeng Xu, Guangqi Cai and Renke Kang
Pages
154-158
DOI
10.4028/www.scientific.net/KEM.416.154
Citation
T. Xing, H. H. Zheng, W. Li, "The Modeling and Simulation of Pneumatic Loading System of Double-Sided Polishing Machine", Key Engineering Materials, Vol. 416, pp. 154-158, 2009
Online since
September 2009
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