Paper Title:
Investigation of Oxygen Vacancies in Micro-Patterned PZT Thin Films Using Raman Spectroscopy
  Abstract

Micro-patterned Pb(Zr,Ti)O3 (PZT) films with dot-pattern were grown by metal organic chemical vapor phase deposition (MOCVD). Micro-patterned Pb(Zr,Ti)O3 (PZT) films were formed on dot-patterned SrRuO3 (SRO) buffer layer that was prepared by MOCVD through the metal mask on (111)Pt/Ti/SiO2/Si substrate. The orientation of dot-patterned PZT films was ascertained by the micro-beam x-ray diffraction (XRD) and their crystallinity was characterized by Raman spectroscopy. It was found that PZT films were oriented to (111) on dot-pattern, while (100)/(001) out of dot-pattern and the amount of oxygen vacancies at the circumference of the dot-pattern were larger than that of center of dot-pattern.

  Info
Periodical
Key Engineering Materials (Volumes 421-422)
Edited by
Tadashi Takenaka, Hajime Haneda, Kazumi Kato, Masasuke Takata and Kazuo Shinozaki
Pages
135-138
DOI
10.4028/www.scientific.net/KEM.421-422.135
Citation
K. Nishida, M. Osada, S. Yokoyama, T. Kamo, T. Fujisawa, K. Saito, H. Funakubo, T. Katoda, T. Yamamoto, "Investigation of Oxygen Vacancies in Micro-Patterned PZT Thin Films Using Raman Spectroscopy", Key Engineering Materials, Vols. 421-422, pp. 135-138, 2010
Online since
December 2009
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Peng Tian, Chong Qing Huang, Wen Hua Luo, Jing Liu
Chapter 2: Opto-Electronics Engineering
Abstract:Self-assembled InAs/GaAs quantum dots structures with low temperature and high temperature cap layers are grown by meta-organic chemical...
269
Authors: Zulfakri bin Mohamad, Rosalena Irma Alip, Takuya Komori, Takashi Akahane, Hui Zhang, Miftakhul Huda, You Yin, Sumio Hosaka
Chapter 3: Nano-Science and Technology
Abstract:CoPt magnetic dot arrays with a fine pitch of 30 nm have been fabricated using electron beam (EB) lithography and ion milling. The...
118
Authors: Sumio Hosaka, Zulfakri bin Mohamad, You Yin, Hiroshi Sakurai, Yuji Kondo, Jun Ariake, Naoki Honda, Motohiro Suzuki
Chapter 3: Nano-Science and Technology
Abstract:We have studied the coercive force of fine magnetic CoPt dot enhanced by nanometer-sizing of the dot. The 39-to 106-nm-sized CoPt magnetic...
122
Authors: Dimitrios Zevgitis, Odette Chaix-Pluchery, Beatrice Doisneau, Mircea Modreanu, Joseph La Manna, Eirini Sarigiannidou, Didier Chaussende
Chapter V: Related Materials
Abstract:High temperature solution growth of Al4SiC4 single crystals was carried out from the melt of silicon and aluminium...
974