Paper Title:
Effects of Pretreatments on Deposition Rate of Films in Aerosol Deposition Method
  Abstract

In the aerosol deposition method (ADM), we investigated an influence of pre-treatments for barium titanate powders as raw material on the deposition rate of thick films. By sieving and drying the powder, deposition rate of the films fabricated by ADM was effectively enhanced. On the other hand, heating the powders at 400-800°C, the resulting powders caused low deposition rate of the films. When a planetary milling was performed prior to charge aerosol chamber, the deposition rate of the films was four times higher than that in deposition using the powder without milling. By changing the milling rotation rate, we control size of agglomerated particles consisting of powders, which results in the control of deposition rate of the films.

  Info
Periodical
Key Engineering Materials (Volumes 421-422)
Edited by
Tadashi Takenaka, Hajime Haneda, Kazumi Kato, Masasuke Takata and Kazuo Shinozaki
Pages
165-168
DOI
10.4028/www.scientific.net/KEM.421-422.165
Citation
K. Mihara, T. Hoshina, H. Kakemoto, H. Takeda, T. Tsurumi, "Effects of Pretreatments on Deposition Rate of Films in Aerosol Deposition Method", Key Engineering Materials, Vols. 421-422, pp. 165-168, 2010
Online since
December 2009
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Price
$32.00
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