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Preparation of CaBi4Ti4O15 Based Thick Films on Si Substrates by Screen Printing

Journal Key Engineering Materials (Volumes 421 - 422)
Volume Asian Ceramic Science for Electronics III and Electroceramics in Japan XII
Edited by Tadashi Takenaka, Hajime Haneda, Kazumi Kato, Masasuke Takata and Kazuo Shinozaki
Pages 50-53
DOI 10.4028/www.scientific.net/KEM.421-422.50
Citation Tatsunori Kakuda et al., 2009, Key Engineering Materials, 421-422, 50
Online since December, 2009
Authors Tatsunori Kakuda, Tomoaki Futakuchi, Tsutomu Obata, Yuichi Sakai, Masatoshi Adachi
Keywords CaBi4Ti4O15, Screen Printing, Thick Film
Abstract

CaBi4Ti4O15 based thick films were prepared by screen-printing method on Si substrates. Screen-printable pastes were prepared by kneading the CaBi4Ti4O15 powder in a three-roll mill with an organic vehicle. The remanent polarization of 6.3 C/cm2 and coercive field of 130kV/cm were obtained for the CaBi4Ti4O15 with Nb2O5 1wt% thick film fired at 1130°C. The cavity structure was prepared by etching of Si substrate. The displacement-electric field butterfly curves were obtained.

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