Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film |
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| Journal | Key Engineering Materials (Volumes 421 - 422) |
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| Volume | Asian Ceramic Science for Electronics III and Electroceramics in Japan XII |
| Edited by | Tadashi Takenaka, Hajime Haneda, Kazumi Kato, Masasuke Takata and Kazuo Shinozaki |
| Pages | 95-98 |
| DOI | 10.4028/www.scientific.net/KEM.421-422.95 |
| Citation | Tsuyoshi Aoki et al., 2009, Key Engineering Materials, 421-422, 95 |
| Online since | December, 2009 |
| Authors | Tsuyoshi Aoki, Shigeyoshi Umemiya, Masaharu Hida, Kazuaki Kurihara |
| Keywords | d15, d31, FIB, Film, Finite Element Model (FEM), PZT, Shearing Mode, SPM |
| Abstract | Piezoelectric films using d15 shear-mode can be applied to many useful MEMS devices. The small displacement derived from the d15 shear-mode was directly observed by a SPM measurement. An isolated PZT(52/48) active part having a pair of driving Cu electrodes was processed in a 5 m-thick sputtering film. The displacement measurement of the active part and its FEM analysis suggested that the estimated d15 piezoelectric constant of the film was 590 pm/V. And, the d31 value of the film was -120 pm/V measured by a conventional cantilever method. The obtained piezoelectric constants of the PZT film are near those of bulk. |
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