Paper Title:
Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film
  Abstract

Piezoelectric films using d15 shear-mode can be applied to many useful MEMS devices. The small displacement derived from the d15 shear-mode was directly observed by a SPM measurement. An isolated PZT(52/48) active part having a pair of driving Cu electrodes was processed in a 5 m-thick sputtering film. The displacement measurement of the active part and its FEM analysis suggested that the estimated d15 piezoelectric constant of the film was 590 pm/V. And, the d31 value of the film was -120 pm/V measured by a conventional cantilever method. The obtained piezoelectric constants of the PZT film are near those of bulk.

  Info
Periodical
Key Engineering Materials (Volumes 421-422)
Edited by
Tadashi Takenaka, Hajime Haneda, Kazumi Kato, Masasuke Takata and Kazuo Shinozaki
Pages
95-98
DOI
10.4028/www.scientific.net/KEM.421-422.95
Citation
T. Aoki, S. Umemiya, M. Hida, K. Kurihara, "Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film", Key Engineering Materials, Vols. 421-422, pp. 95-98, 2010
Online since
December 2009
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Price
$32.00
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