Paper Title:
Fabrication of ZnO Thin Film Transistors Based on the Substrate of Glass
  Abstract

In our paper, we induced the process of ZnO based thin film transistors (ZnO-TFTs) fabricated on the substrate of glass. The photolithographic plate designed for using in the ZnO-TFT devices fabrication process was shown in our paper. The ZnO-TFT devices were fabricated successfully, the Ion/off ratio is ~104.

  Info
Periodical
Key Engineering Materials (Volumes 428-429)
Edited by
Yuan Ming Huang
Pages
501-504
DOI
10.4028/www.scientific.net/KEM.428-429.501
Citation
X. Yang, C. Wang, C. Zhao, W. Tang, X. Gao, J. Yang, B. Liu, X. Qi, G. Du, J. Cao, "Fabrication of ZnO Thin Film Transistors Based on the Substrate of Glass", Key Engineering Materials, Vols. 428-429, pp. 501-504, 2010
Online since
January 2010
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Price
$32.00
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