Paper Title:
Research on Quantum State in Fabricating Poly-Si Films
  Abstract

Amorphous silicon films prepared by PECVD on glass substrate have been crystallized by rapid thermal annealing (RTA). By means of micro-Raman scattering and scanning electronic microscope (SEM), the quantum states in these processions are found and discussed.

  Info
Periodical
Key Engineering Materials (Volumes 428-429)
Edited by
Yuan Ming Huang
Pages
540-543
DOI
10.4028/www.scientific.net/KEM.428-429.540
Citation
R. M. Jin, L. L. Chen, P. H. Luo, X. F. Guo, J. X. Lu, "Research on Quantum State in Fabricating Poly-Si Films", Key Engineering Materials, Vols. 428-429, pp. 540-543, 2010
Online since
January 2010
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$32.00
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