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Experimental Research on Cutting of Silicon with Fixed Diamond Wire Saw

Journal Key Engineering Materials (Volumes 431 - 432)
Volume Machining and Advanced Manufacturing Technology X
Edited by Yingxue Yao, Dunwen Zuo and Xipeng Xu
Pages 25-28
DOI 10.4028/www.scientific.net/KEM.431-432.25
Citation Li Gang Zhao et al., 2010, Key Engineering Materials, 431-432, 25
Online since March, 2010
Authors Li Gang Zhao, Dun Wen Zuo, Yu Li Sun, Min Wang
Keywords Fixed Diamond Wire Saw, Silicon Wafer
Abstract

The experimental research on silicon was reported in this paper. The surface roughness under the different workpiece feed speed and linear velocity of the wire saws is studied mainly in this experiment. The effects of the workpiece feed Vs and the linear velocity of the wire saws Vw were analyzed.

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