Micro-mould is a necessary and productive component for the development of MEMS. However, the machining of micro-mould parts with complex 3D surfaces becomes the key problem for the development of micro machinery. In the paper, a new machining technique was introduced to manufacture micro-mould parts. With a reverse engineering technique, point cloud data were acquired and reconstructed into a 3D model of micro mould part in a computer. The numeral control code for micro-machining was also processed with the help of micro-machining simulation. The machining experiment on micro-parts with complex 3D surfaces was conducted on self-developed micro machine tools with micro-diameter ball-end cutter. High quality micro mould parts with complex 3D surfaces were obtained under these micro-milling experiments. The results will provide a perspective resolution on the manufacturing of micro-mould parts with complex surfaces.