Paper Title:
Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes
  Abstract

In this work, the elastic constant and natural frequency of NCD and non-NCD coated AFM probes were simulated using ANSYS. The results indicated that after depositing 1~2μm thick NCD films on the silicon probes, the elastic constant and natural frequency were both increased, yet within the prescribed limit: when the cantilevers had the same total thicknesses (3μm, 3.5μm and 4μm), the elastic constant and the natural frequency of the NCD coated probes were increased by 96%~107% and 28%~30% respectively, compared with the silicon probes.

  Info
Periodical
Key Engineering Materials (Volumes 431-432)
Edited by
Yingxue Yao, Dunwen Zuo and Xipeng Xu
Pages
491-494
DOI
10.4028/www.scientific.net/KEM.431-432.491
Citation
Y. Jiang, X. F. Li, D. W. Zuo, J. J. Yuan, "Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes", Key Engineering Materials, Vols. 431-432, pp. 491-494, 2010
Online since
March 2010
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