Paper Title:
Study on Deposition of NCD on AFM Probe
  Abstract

The performance of Atomic Force Microscope (AFM) is greatly determined by the quality of its probe. Nowadays, probes of diamond tips have become more and more popular than silicon ones, and have been widely used in industries. In this paper, research about the fabricating of nanocrystalline diamond (NCD) coated AFM probe has been done using Hot-Filament Chemical Vapour Deposition (HFCVD) technique. The results showed that NCD films have been grown on the probe. Problems about the growth of NCD on the tips have been discussed. The optimum parameters have also been proposed. This research can provide reference for the further experiments on the fabrication of NCD coated tips.

  Info
Periodical
Key Engineering Materials (Volumes 431-432)
Edited by
Yingxue Yao, Dunwen Zuo and Xipeng Xu
Pages
499-502
DOI
10.4028/www.scientific.net/KEM.431-432.499
Citation
M. M. Huang, D. W. Zuo, W. Z. Lu, F. Xu, M. Wang, "Study on Deposition of NCD on AFM Probe", Key Engineering Materials, Vols. 431-432, pp. 499-502, 2010
Online since
March 2010
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Price
$32.00
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