Paper Title:
The Influence of Annealing Treatment on Physics and Electrical Characteristics of Ba(Zr0.1Ti0.9)O3 Ferroelectric Films on ITO/Glass Substrate
  Abstract

Perovskite Ba(Zr0.1Ti0.9)O3 (BZ1T9) ferroelectric thin films well deposited on ITO/glass substrates for applications in system-on-panel (SOP) devices are produced and investigated. The sputtering parameters of as-deposited BZ1T9 thin films were rf power of 160 W, chamber pressure of 10 mTorr, substrate temperature of 550oC, and an oxygen concentration of 40%. From the SEM cross- sectional observation, the deposition rate were about 2.5 nm/min. Additionally, the maximum dielectric constant and leakage current density of annealed BZT films under the rapid temperature annealing would be increased, as the temperature increased to 6500C. Further, the maximum remnant polarization and coercive field of BZT films were found and calculated from the p-E curves.

  Info
Periodical
Key Engineering Materials (Volumes 434-435)
Edited by
Wei Pan and Jianghong Gong
Pages
289-292
DOI
10.4028/www.scientific.net/KEM.434-435.289
Citation
W. C. Tzou, C. M. Cheng, K. H. Chen, H. C. Yang, G. H. Shen, C. F. Yang, "The Influence of Annealing Treatment on Physics and Electrical Characteristics of Ba(Zr0.1Ti0.9)O3 Ferroelectric Films on ITO/Glass Substrate", Key Engineering Materials, Vols. 434-435, pp. 289-292, 2010
Online since
March 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: De Yin Zhang, Wei Qian, Kun Li, Jian Sheng Xie
Chapter 10: Functional Materials
Abstract:The Ion Beam Enhanced Deposited (IBED) lithium tantalate (LiTaO3) thin film samples with Al/LiTaO3/Pt electrode...
1418
Authors: Ping Luan, Jian Sheng Xie, Jin Hua Li
Chapter 3: Surface, Subsurface, and Interface Phenomena
Abstract:Using magnetron sputtering technology, the CuInSi thin films were prepared by multilayer synthesized method. The structure of CuInSi films...
822
Authors: Jian Sheng Xie, Ping Luan, Jin Hua Li
Chapter 9: Composite Materials II
Abstract:Using magnetron sputtering technology, the CuInSi nanocomposite thin films were prepared by multilayer synthesized method. The structure of...
2770
Authors: Jian Sheng Xie, Jin Hua Li, Ping Luan
Chapter 2: Surface, Subsurface and Interface Phenomena
Abstract:Thin CuInSi films have been prepared by magnetron co-sputtering, and followed by annealing in N2 atmosphere at different...
302
Authors: Xiao Hua Sun, Shuang Hou, Zhi Meng Luo, Cai Hua Huang, Zong Zhi Hu
Chapter 1: Engineering Science for Manufacturing
Abstract:Bismuth zinc niobate titanium (Bi1.5Zn0.5 Nb0.5Ti1.5O7) (BZNT) thin films were deposited on PtTiSiO2Si substrates by radio frequency (rf)...
211